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MEMS Module
 The MEMS Module addresses design issues that arise in the world of micro-devices.
Most MEMS applications are multiphysics by their very nature and usually include electromagnetic field-structure, thermal-structure, fluid-structure (FSI), or electromagnetic field-fluid interactions.
To this end, the MEMS Module provides equations and settings optimized for modeling the multiphysics that these interac-tions require. Among other micro-devices, it models physical phenomena in actuators and sensors plus microfluidic and piezoelectric devices.
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